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Illustration

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Illustration

Sélectionnez un élément

Cliquez sur une séquence, une étape ou une machine pour afficher ses détails.

Select a machine to configure it

Process Visualization
Idle
00:00

développement — Paillasse de nettoyage

Thermal furnace chamber
Idle
500 nm
00:00
Atmospheric tool - target plate
Idle
Target: —
00:00
Atmospheric tool - target plate
00:00
Spin Coating Visualization
Idle
00:00
Spin Coating Visualization
Idle
00:00
Process Visualization
00:00
Process Visualization
00:00
Process Visualization
00:00
Process Visualization
00:00
Process Visualization
00:00
UV Exposure Chamber
00:00
Alignment Monitor
Target A
Target B
00:00
Process Visualization
00:00
Process Visualization
00:00
Process Visualization
00:00
Process Visualization
00:00
Process Visualization
00:00

Select a machine to configure it

1) Nettoyage Available
Séquence de nettoyage
Sélectionnez les bons liquides et les durées, puis lancez la séquence (timer simulé).
Not started
Summary
Phase 1—
Phase 2—
Phase 3—
Phase 4—
Phase 5—
Phase 6—
Final check
Réalisez le process complet, puis lancez le contrôle final.
Not checked

développement — Paillasse de nettoyage

Oxidation
Available
Parameterization
Not started
Summary
Gas—
Temperature—
Duration—
Final check
Run the oxidation to enable validation.
Not validated
1) TiW deposition
Available
TiW deposition
Not started
Summary
Target—
Power—
Pressure—
Gas—
Flow—
Duration—
Final check
Not validated
1) Au deposition
Available
Au deposition
Not started
Summary
Target—
Power—
Pressure—
Gas—
Flow—
Duration—
Final check
Not validated
1) Spin coating Available
Spin Coating Parameters
Enter the required values, then run the process.
Not started
Summary
Speed—
Stage accel—
Time—
Final check
Run the spin coating to validate.
Not validated
1) Spin coating Available
Spin Coating Parameters
Enter the required values, then run the process.
Stage 1
Stage 2
Not started
Summary
Stage 1 - Speed—
Stage 1 - Stage accel—
Stage 1 - Time—
Stage 2 - Speed—
Stage 2 - Stage accel—
Stage 2 - Time—
Final check
Run the spin coating to validate.
Not validated
Soft bake Available
Soft bake
Enter your parameters, run the bake, then validate at the end.
Not started
Summary
Temperature—
Duration—
Final check
Run the soft bake to validate.
Not validated
Hard bake Available
Hard Bake
Enter your parameters, run the bake, then validate at the end.
Not started
Summary
Hard bake—
Final check
Run the hard bake to validate.
Not validated
Soft bake Available
Soft bake
Enter any values, run the full bake, then validate only at the end.
Stage 1
Stage 2
Stage 3
Not started
Summary
Stage 1 - Temp—
Stage 1 - Time—
Stage 2 - Temp—
Stage 2 - Time—
Stage 3 - Temp—
Stage 3 - Time—
Final check
Run the full bake to validate.
Not validated
Post-exposure bake Available
Post-Exposure Bake
Enter any values, run the full bake, then validate only at the end.
Stage 1
Stage 2
Stage 3
Not started
Summary
Stage 1 - Temp—
Stage 1 - Time—
Stage 2 - Temp—
Stage 2 - Time—
Stage 3 - Temp—
Stage 3 - Time—
Final check
Run the full bake to validate.
Not validated
Hard bake Available
Hard Bake
Enter your parameters, run the bake, then validate at the end.
Not started
Summary
Hard bake—
Final check
Run the hard bake to validate.
Not validated
UV Exposure
Available
UV Exposure
Enter your parameters, run the UV exposure, then validate at the end.
Not started
Summary
Power—
UV lamp—
Exposure time—
Final check
Complete alignment and UV exposure to validate.
Not validated
1) Alignment
Available
2) UV Exposure
Locked
Step 1 — Alignment
15
-10
3°
Not checked
Step 2 — UV Exposure
Enter your parameters, run the UV exposure, then validate at the end.
Locked
Summary
Power—
UV lamp—
Exposure time—
Final check
Complete alignment and UV exposure to validate.
Not validated
Development
Available
Development
Select the developer, set time, and press Start.
Not started
Summary
Developer—
Time—
Final check
Complete the development to proceed.
Not validated
Development
Available
Development
Select the developer, set time, and press Start.
Not started
Summary
Developer—
Time—
Final check
Complete the development to proceed.
Not validated
Chrome Etching
Available
Gravure Cr
Select etchant and duration.
Not started
Summary
Product—
Time—
Final check
Complete etching to validate.
Not validated
Gold Etching
Available
Gravure Au
Select etchant and duration.
Not started
Final check
Complete etching to validate.
Not validated
Resist Stripping
Available
Stripping
Remove the photoresist (Acetone).
Not started
Final check
Complete stripping to validate.
Not validated
Configuration
No manual configuration needed for this machine. A technician configured it for you.
Final check
Validate this step to continue.
Not validated
Configuration
No manual configuration needed for this machine. A technician configured it for you.
Final check
Validate this step to continue.
Not validated
Configuration
No manual configuration needed for this machine. A technician configured it for you.
Final check
Validate this step to continue.
Not validated
Inspection
Available
Visual Inspection
Inspect the final device.
Not started
Final check
Not validated

Remaining steps

14 pieces left to place

Remaining machines

0 piece left to place

How do you build a heating circuit whose dimensions are smaller than the diameter of a human hair?

Microelectronics

Fabricating this chip relies on microfabrication processes. These technologies are used to build our computers and phones. That is microelectronics.

Cleanroom

To fabricate these objects, you need to work in a dust-free environment known as a cleanroom.

What you are about to discover

Discover these technologies inside the ESIEE Paris cleanroom at Gustave Eiffel University and step into the shoes of a process engineer.

From thin-film deposition through photolithography to chip dicing, the secrets of microfabrication will soon become much clearer.

Not started

Process steps

Discover microelectronics processes without prior knowledge and understand their main principles

Not started

Equipment selection

Select the equipment used during microdevice fabrication

Not started

Configuration

Set up the equipment used for microdevice fabrication and validate the full process (specific ESIEE Paris teaching workflow)